4

Tantalum as a diffusion barrier between copper and silicon

Year:
1990
Language:
english
File:
PDF, 562 KB
english, 1990
6

Tantalum and Tantalum Nitride as Diffusion Barriers Between Copper and Silicon

Year:
1990
Language:
english
File:
PDF, 1.25 MB
english, 1990
19

High-resolution and in situ tem studies of annealing of Ti-Si multilayers

Year:
1988
Language:
english
File:
PDF, 895 KB
english, 1988